TITLE: Microstereolithography and other Fabrication Techniques for 3D MEMS
AUTHOR: Vijay K. Varadan
The application of MEMS (micro-electro-mechanical systems) in such
diverse fields as intelligent microsensors, data storage, biomedical
engineering and wireless communication is booming. Focusing on
microstereolithography, this timely work provides insight into state-of-the-art
microfabrication techniques for 3D microstructures, microdevices and MEMS.
- A unique and accessible overview of micro-system manufacture using
the latest semiconductor processing techniques
- Coverage of the developmental history of MEMS, micro-sensors,
actuators and signal processing units.
- Insight to a range of microfabrication techniques from laser ablation
to x-ray lithography, silicon micro-machining and micro-moulding.
- Describes the latest fabrication prototypes and applications, including
thin-film transistors, antennas, wireless telemetry systems and transducers
Microelectronics engineers will profit form this detailed overview of current
technologies. Material technologists and physicists working in industrial and
academic research and development will also find this a valuable reference
TABLE OF CONTENTS:
Fundamentals of Polymer Synthesis for MEMS.
Microstereolithography Techniques I-Scanning Method.
Microstereolithography Techniques II-Projection Method.
Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.
Combined Silicon and Polymeric Structures.
Appendix 1: Some Polymers for MEMS.
Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.