Highest precision for measuring liquid flow in the range of 0-120ml/min

The newest liquid flow sensor from Swiss sensor manufacturer Sensirion excels thanks to its ultra-pure materials and outstanding precision. The small SLQ-QT500 sensor is designed for the needs of the semiconductor industry:

"The SLQ-QT500 is perfect for the high purity requirements of the semiconductor industry. It can be used to monitor coating processes with a variety of liquids and enables optimal process safety," says Dr. Andres Laib, Director of Sales Liquid Flow Products.

The SLQ-QT500 covers flow rates from 0 - 120ml/min. As with all Sensirion liquid flow sensors, its flow channel is absolutely straight and has no moving parts. The sensor is based on the patented CMOSens® Technology. The microthermal flow measurement is performed through the flow channel wall, which separates the chip from the measured liquids. Therefore, only the PFA tubing and the quartz flow channel are in direct contact with the liquid. This guarantees that the sensor has a superb chemical resistance. Thanks to these features as well as the RS485 digital interface, the sensor is able to achieve an exceptionally reliable measurement with a sample rate of up to 1 ms.

With this unique technology even liquids with a very high viscosity (100,000 cP and more) are not a problem. Andres Laib says: "The sensor is suitable for measuring hydrocarbon-based solvents such as photoresists, as well as water-based liquids such as TARC and H2O2. With the SLQ-QT500, liquids with virtually any viscosity as well as liquids which contain particles can be measured. This makes the sensor unique in the liquid flow sensor industry."

You can find further information on this product here:

About Sensirion
The Swiss sensor manufacturer Sensirion AG is a leading international supplier of CMOS-based sensor components and systems. Its range of high-quality products includes humidity and temperature sensors, mass flow meters and controllers, gas and liquid flow sensors, and differential pressure sensors. Sensirion supports its international OEM customers with tailor-made sensor system solutions for a wide variety of applications. Among others, they include analytical instruments, consumer goods, and applications in the medical technology, automotive and HVAC sectors. Sensirion products are distinguished by their use of patented CMOSens® technology. This enables customers to benefit from intelligent system integration, including calibration and digital interfaces. Sensirion's competence as a reliable OEM partner is underlined by its quality management system, which was certified in March 2008 in accordance with the ISO/TS 16949 standard.

For more information, please contact :-

Sensirion AG
Laubisruetistrasse 50, CH-8712 Staefa ZH, Switzerland
Telephone : +41 44 306 40 00
Fax : +41 44 306 4030
Email :
Website :

July 2013

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