Laser Sensors have 10 nanometer resolution.
A new range of non-contact laser based gauging sensors
with a resolution of 10 nanometers are now available from
Using a specular reflective triangulation measurement principle
this new product, designated the SLS 7000, is suitable for measuring
on highly reflective surfaces such as silicon wafers, stainless steel
even true mirrors.
This highly specialised Class II sensor has a 16 kHz sampling rate
and employs a "Fast Light Control Circuit", it is designed to operate
over a 1 millimeter measuring range. By utitising an extremely small
visible laser spot of only 10 to 20 microns diameter the SLS 7000
is specially well suited to the profiling of intricate shapes which
contain minuscule cracks and grooves.
Although it is a very precise device the SLS 7000 is extremely
rugged and quite compact. Careful mechanical layout combined
with high quality optics and state-of-the-art electronics have resulted
in a system which is very insensitive to external noise and spurious
reflections from the target surface. The design allows for the integration
of a CCD camera to aid an operator in positioning the head over the
Specific applications include the measurement of the surface
roughness of silicon wafers during semiconductor manufacture
but it is suitable for many other inspection applications.
Each SLS 7000 is fadtory calibrated to provide a resolution of
10 nanometers and an accuracy of 0.05%.
information, please contact:-
+44(0) 1327 351004
Fax: +44(0) 1327 353564