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          Liquid flow sensor
          for low-volume dosing applications

          
Swiss sensor
          manufacturer Sensirion is launching a flow sensor for flow rates
          below 2 cc/sec (120 ml/min) with hydrocarbon-based liquids such
          as photoresists and solvents. Designed for use in high-purity
          fluid handling applications in the semiconductor, PV and flat
          panel display industries, the new SLQ-QT105 sensor features a
          short measurement response time of approximately 40 ms and very
          high sensitivity for flow rates down to 0.05 cc/sec (3 ml/min).
          Detection of air bubbles in the microliter range is also possible.

          
Flow is measured
          without moving parts and non-invasively through the wall of a
          straight flow path. All wetted materials are made from Teflon®
          or quartz glass. The compact, lightweight device is equipped
          with fittings for 4x3mm PFA tubing. A smart digital interface
          and robust RS485 communication is offered for long distance and
          bus capability.

          

          
August 2011

          

            

              
                
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